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Product Description
Process Gas Specialty Filter, also known as Point-to-Use Inline Filter, is specifically designed for the semiconductor industry to precisely remove micro-particles from UHP (Ultra-High Purity) gas streams, ensuring production purity.
Its installation is simple, requiring only the connection to the gas pipeline and tightening of the nuts, avoiding welding risks and ensuring a reliable seal.
Made entirely of premium 316L stainless steel, it features a compact and lightweight design that significantly reduces pressure loss while delivering exceptional particle filtration efficiency. This makes it the ideal choice for purifying process gases.
HENGKO supplies professional OEM Point-to-Use Inline Gas Filters, tailored to meet the stringent demands of high-performance industrial applications.
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Product Feature
☆100% 316L Stainless Steel Construction
Ensures durability, high resistance to corrosion, and compatibility with demanding industrial environments.
☆High Temperature, High Pressure, and Corrosion Resistance
Ideal for use in extreme conditions, providing reliable performance under high temperatures and pressures.
☆100% Ammonia Leak Testing
Each unit undergoes rigorous ammonia leak testing to guarantee safe and reliable sealing performance.
☆High Flow Rate with Low Resistance
Designed for efficient gas flow, reducing pressure loss and maintaining optimal system performance.
☆Suitable for Various Process Gases
Versatile design supports a wide range of industrial gases, making it suitable for multiple applications.
☆Ultra-High Particle Capture Rate
Ensures superior filtration performance, effectively capturing even the smallest particles for maximum purity.
☆100% Integrity Testing
Every filter is thoroughly tested to ensure structural and operational integrity, meeting the highest quality standards.
☆Ideal for Cleanroom Environments
Specially designed for use in cleanroom conditions, ensuring cleanliness during manufacturing, testing, and packaging processes.
Datasheet
Technical Parameters |
Values |
Filter Material |
316L Stainless Steel Powder Sintered |
Housing Material |
316L Stainless Steel |
Helium Leak Validation Rate |
|
Helium Test Leak Rate |
|
Surface Treatment |
Outer Surface Ra < 1.6 μm |
Inner Surface Ra < 0.2 μm |
Maximum Operating Temperature |
Inert gas:400-500ºC
Corrosive and Reactive Gases: 50ºC
|
Particle Interception Efficiency |
≥99.9999999% (9LRV) @30 slpm |
Downstream Cleanliness |
≤ 0.03 particles/liter
@>0.01μm,30slpm
|
Particle Interception Size |
≥0.003 μm |
Product Model |
End Connection Type and Size |
Filtration Area Specification |
Dimension A |
Dimension B |
Z01B-00652 |
1/8 in. Double Ferrule |
2 |
59.7 |
14.3 |
Z01B-00651 |
1/4 in. Double Ferrule |
4 |
74.9 |
19.1 |
Z01B-00653 |
3/8 in. Double Ferrule |
8 |
81.5 |
25.4 |
Z01B-00654 |
1/2 in. Double Ferrule |
8 |
88.6 |
25.4 |
Z01B-00585 |
3 mm Double Ferrule |
2 |
60.5 |
14.3 |
Z01B-00655 |
6 mm Double Ferrule |
4 |
75.2 |
19.1 |
Z01B-00656 |
1/8 in. NPT Female Thread |
2 |
54.9 |
14.3 |
Z01B-00657 |
1/4 in. NPT Female Thread |
4 |
72.9 |
19.1 |
Z01B-00659 |
1/8 in. NPT Male Thread |
2 |
47.7 |
14.3 |
Z01B-00658 |
1/4 in. NPT Male Thread |
4 |
68.3 |
19.1 |
Z01B-00660 |
1/8 in. VCR Male Thread |
2 |
70.8 |
19.1 |
Z01B-00661 |
1/4 in. VCR Male Thread |
4 |
70.8 |
19.1 |
Z01B-00662 |
1/8 in. RC Female Thread |
2 |
54.9 |
14.3 |
Z01B-00663 |
1/4 in. RC Female Thread |
4 |
72.9 |
19.1 |
Z01B-00702 |
1/8 in. RC Male Thread |
2 |
47.7 |
14.3 |
Z01B-00703 |
1/4 in. RC Male Thread |
4 |
68.3 |
19.1 |
Typical Applications
For use with W-seal and C-seal, 1.125" and 1.5" surface mount modular gas delivery systems.
☆Compressed Air Systems
☆Natural Gas Processing and Distribution
☆Biogas and Biomethane Production
☆Food and Beverage carbon dioxide Gas Systems
☆Semiconductor Manufacturing
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Our filter elements come in a variety of different alloys, each with its own special benefits and purposes. Whether you require a stainless steel filter for its durability and corrosion resistance or a high-performance monel filter for its porous structure and exceptional filtration capabilities, we have a product that will meet your needs.
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HENGKO stainless steel filter disc is made by sintering 316L powder material or multilayer stainless steel wire mesh at high temperatures. They have been widely used in environmental protection, petroleum, natural gas, chemical, environmental detection, instrumentation, pharmaceutical equipment, and other fields.
Company Profile
HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together.