Surface Mount C Seal Filter Solutions for Semiconductor Gas Delivery Systems

• Customization: Available
• Filter Number: 1
• Medium Material: Stainless Steel
• Filtration Grade: High Purity Filtration
• Type: Semiconductor Filters
• Filter Element Material: 316L Stainless Steel Sintered Powder
• Housing Material: 316L Stainless Steel
• Maximum Inlet Pressure: 3.4 MPa @ 100°c
• Maximum Operating Differential: 0.69 MPa @ 100°c
• Maximum Operating Temperature: 460°c
• Particle Interception Size: ≥0.003 μm
• Flow Range: 0 ~ 120 Slpm
• Transport Package: Boxs
• Trademark: HENGKO
• Origin: Shenzhen, China

Product Description

Surface Mount C Seal Filter Solutions for Efficient Gas Delivery Systems by IGS

 

Product Description

HENGKO Surface Mount Filters are designed to meet the demanding requirements of integrated gas systems used in semiconductor OEM tools. Offering industry-leading filtration at 0.003 µm, these filters ensure exceptional performance and reliability with a particle interception efficiency of ≥99.9999999% (9-LRV) at 120 slpm.

Constructed from robust 316L stainless steel powder sintered for the filter element and housing, these filters are compliant with SEMI F86-0304 specifications, featuring two-port components tailored for 1.125" gas distribution systems with a C-seal configuration. They support maximum inlet pressure of 3.4 MPa at 100°C and a maximum operating pressure differential of 0.69 MPa at 100°C.

These specialized filters, compatible with both C-type and W-type seal specifications, achieve downstream cleanliness with particle release of With a surface finish of Ra < 1.6 µm on the exterior and Ra < 0.13 µm on the interior, they are designed to withstand high temperatures up to 460°C. Engineered for easy integration and modular design upgrades, these filters simplify installation and maintenance, helping to optimize system performance in semiconductor gas delivery and control applications.
 

Product Feature
Overall 316L stainless steel construction
Miniaturized design, compact structure, space-saving
Excellent gas replacement and desorption characteristics
High temperature, high pressure, and corrosion resistant
Electro-polished 316L stainless steel housing
Easy and efficient installation and maintenance
Mechanical sealing, structurally non-welded to the medium

Datasheet

Technical Parameters	Values
Filter Element Material	316L Stainless Steel Sintered Powder
Housing Material	316L Stainless Steel
Maximum Inlet Pressure	3.4 MPa @ 100°C
Maximum Operating Differential	0.69 MPa @ 100°C
Helium Verification Leak Rate
Helium Test Leak Rate
Surface Treatment	Outer Surface Ra < 1.6 μm
	Inner Surface Ra < 0.13 μm
Maximum Operating Temperature	460°C
Particle Interception Efficiency	≥99.9999999% (9-LRV) @ 120 slpm (Reference MPPS, all particles)
Downstream Cleanliness	Particle Release: < 0.03 particles/liter (< 1 particle/ft³)
	Volatiles: < 10 ppb moisture
Particle Interception Size	≥0.003 μm
Flow Range	0 ~ 120 slpm

Size

 

Product Model	Flow Rate	Height H (mm)	Filtration Precision	Cleaning Level
Z01B-00637	10 slpm	51.6	0.003 μm	C
Z01B-00638	40 slpm	82.9	0.003 μm	C
Z01B-00687	80 slpm	126.2	0.003 μm	C
Z01B-00688	120 slpm	167.9	0.003 μm	C

Typical Applications
For use with W-seal and C-seal, 1.125" and 1.5" surface mount modular gas delivery systems.

 

Company Profile

HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together. 

 

Packaging & Shipping

 

 

FAQ

Q1. Are you manufacturer or trading company?

--We are direct manufacturer specializing in porous sintered metal filters.

Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.

Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.

Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.

Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.

Q6. We have design, can you produce?
--Yes, welcome!

Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc