Customizable 316L Stainless Steel Sintered Metal Disc VCR Gasket Filters for Semiconductor Industry

• Customization: Available
• Filter Number: 1
• Medium Material: Stainless Steel
• Efficiency: 0.1um - 90um
• Filtration Grade: 0.1um - 90um
• Type: Cartridge Filter
• Filter Material: Sintered 316L Stainless Steel Powder
• Housing/Gasket Material: 316L Stainless Steel
• Maximum Operating Temperature: 400°c
• Available Models: Low-Pressure and High-Pressure Versions
• Application: Semiconductor Gas Distribution Systems, MFC Module
• Transport Package: Boxs
• Trademark: HENGKO
• Origin: Shenzhen, China
• HS Code: 8421999090
• Production Capacity: 9990000000

Product Description

 

316L Stainless Steel Sintered Metal Micro-Porous VCR Gasket Filter
 

HENGKO is a professional OEM factory specializing in the production of high-quality VCR gasket filters,designed to provide efficient filtration solutions for various industrial applications.

 

Product Description

Porous Metal Gasket Filter for Semiconductor Applications
A Reliable Solution for Protecting Precision Gas Systems:
1) Designed specifically for semiconductor gas distribution systems, this all-metal filter offers seamless compatibility with 1/4", 3/8", and 1/2" VCR standard gasket interfaces.

2) The gasket-style design ensures easy installation, making it an essential protective barrier for MFC (Mass Flow Controller) modules, precision valves, and pressure regulators.

3) Capable of withstanding temperatures up to 400°C, the Porous Metal Gasket Filter effectively blocks particle intrusion,safeguarding sensitive gas components.

4) By preventing contamination-related leaks, it extends equipment lifespan and reduces maintenance costs.

5) Available in both low-pressure and high-pressure models, this filter can be retrofitted into existing piping systems,providing a cost-effective solution for protecting precision equipment from contamination.

Low Pressure Series
Suitable for low-pressure system pipelines
*Maximum operating pressure 0.98Mpa
*Flow range: 0~100slpm

Part Number	Pore Size	Sealing Surface Size	A	B	C
Z01B-00640	0.3μm	1/4" VCR	φ11.9mm	φ5.50mm	1.6mm
Z01B-00690	0.3μm	1/2" VCR	φ19.20mm	φ11.2mm	1.6mm
Z01B-00691	0.3μm	3/8" VCR	φ19.20mm	φ11.2mm	1.6mm
Z01B-00693	1.0μm	1/4" VCR	φ11.9mm	φ5.50mm	1.6mm
Z01B-00694	1.0μm	1/2" VCR	φ19.20mm	φ11.2mm	1.6mm
Z01B-00692	1.0μm	3/8" VCR	φ19.20mm	φ11.2mm	1.6mm

Specification

Technical Parameter	Details
Filter Material	Sintered 316L stainless steel powder
Housing/Gasket Material	316L stainless steel
Surface Finish (Exterior)	Ra ≤ 1.6μm
Surface Finish (Interior)	Polished + electropolished, Ra ≤ 0.2μm
Maximum Operating Temperature	400°C
Particle Retention Efficiency	≥99.9999999% (9 LRV) @ 100 slpm (based on MPPS, for all particles)
Particle Size Capture	≥0.3μm
Compatible Sizes	1/4'', 3/8'', and 1/2'' VCR standard gasket interfaces
Application	Semiconductor gas distribution systems, MFC modules, precision valves, and pressure regulators
Available Models	Low-pressure and high-pressure versions

 

Product Features

Material	Entirely constructed from 316L stainless steel
Installation	Can be used as a surface-sealing filter, eliminating the need for additional work such as cutting or welding pipes for installation
Durability	Resistant to high temperature, high pressure, and corrosion

Applications of Porous Stainless Steel VCR Gasket Filter
 

Semiconductor Manufacturing
Pharmaceutical and Biotech Industries
Aerospace and High-Tech Manufacturing
Chemical Processing

Laboratory and Research Facilities
High-Purity Gas Distribution
Cryogenic Gas Systems
Oil and Gas Industry

Key Benefits for Applications
*High-temperature and high-pressure resistance allows the filter to function reliably in extreme conditions.
*Corrosion resistance of 316L stainless steel ensures long service life, even in chemically aggressive environments.
*Convenient installation without the need for additional cutting or welding makes it easy to retrofit into existing systems.

Company Profile

HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together. 

 

Packaging & Shipping

 

 

FAQ

Q1. Are you manufacturer or trading company?

--We are direct manufacturer specializing in porous sintered metal filters.

Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.

Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.

Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.

Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.

Q6. We have design, can you produce?
--Yes, welcome!

Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc