High Purity and High Pressure Ss 316L Gas Diffusers Filter for Unmatched Filtration and Precise Flow Control

• Customization: Available
• Filter Number: 1
• Type: Cartridge Filter
• Model NO.: High Purity Gas Diffuser - DF series
• Filter Material: 316L Stainless Steel Powder Sintered
• Housing Material: 316L Stainless Steel
• Particle Interception Size: ≥ 0.003μm
• Maximum Inlet Pressure: 4 Bar
• Maximum Operating Differential Pressure: 5 Bar
• Maximum Operating Temperature: 400ºC
• Transport Package: Boxs
• Trademark: HENGKO
• Origin: Shenzhen, China

Product Description

Superior Filtration and Reliable High-Pressure Flow Control
for Semiconductor Processes

 

Product Description

The Diffuser Filter is a cutting-edge solution specifically designed for rapid venting applications in vacuum chambers used in semiconductor manufacturing processes.
Combining the flow characteristics of a diffuser with the particle interception capabilities of a high-efficiency filter,this product ensures unmatched performance and reliability.

 

Key Features
Ultra-High Filtration Precision:

Achieves filtration accuracy of up to 0.003μm, effectively capturing even the smallest particles to protect sensitive semiconductor environments.

 

Innovative 316L Stainless Steel Construction:
Crafted entirely from 316L stainless steel, this unique design ensures exceptional durability, corrosion resistance, and superior filtration efficiency.

 

Turbulence-Free Design:
Engineered to minimize turbulence, preventing any disturbance to the process chamber environment.
This feature safeguards against particle resuspension or wafer surface contamination, maintaining the integrity of the production process.

 

Customizable and Flexible:
Tailored to fit various installation spaces, the filter adapts seamlessly to diverse system requirements,providing a versatile solution for semiconductor manufacturing needs.

                

Product Feature

☆Sintered Stainless Steel Media for Rapid Venting

☆Full 316L Stainless Steel Construction
☆Reduces Turbulence During Chamber Exhaust
☆Compatible with a Wide Range of Process Gases
☆Manufactured, Tested, and Packaged in Cleanroom Environments
☆100% Integrity Testing
☆100% Helium Leak Detection Passed
☆High-Temperature, High-Pressure, and Corrosion Resistant
☆Prevents Particle Contamination
☆Customizable Design

Datasheet

Parameter	Specification	Parameter	Specification
Filter Material	316L Sintered Stainless Steel	Housing Material	316L Stainless Steel
Surface Treatment	Inner Surface: Ra ≤ 32μm	Filtration Accuracy	≥ 0.003μm
Maximum Inlet Pressure	4 bar	Maximum Operating Differential Pressure	5 bar
Maximum Operating Temperature	400ºC	Downstream Cleanliness	≤ 0.03 particles/liter @ >0.01μm rated flow

Size 

Product Information Table for Disc filter type

Product Model	Inlet Specification	Outlet Specification	Total Length (A)	Filter Element OD (φB)	Housing OD (φC)
Z01B-00639	1/4'' VCR	ISO NW40 Vacuum Flange	42mm (1.64'')	Φ39mm (1.53'')	Φ55mm (2.16'')
Z01B-00695	1/4'' VCR	ISO NW50 Vacuum Flange	42mm (1.64'')	Φ52mm (2.05'')	Φ75mm (2.95'')

Product Information Table for Cartridge filter type

Product Model	Inlet Specification	Outlet Specification	Total Length (A)	Filter Element OD (φB)	Housing OD (φC)	Filter Tube Length (D)
Z01B-00697	1/4'' VCR	ISO NW16 Vacuum Flange	81mm (3.18'')	Φ16mm (0.64'')	Φ30mm (1.18'')	44mm (1.74'')
Z01B-00501	1/4'' VCR	ISO NW16 Vacuum Flange	104mm (4.08'')	Φ16mm (0.64'')	Φ30mm (1.18'')	67mm (2.64'')
Z01B-00698	1/4'' VCR	ISO NW16 Vacuum Flange	135mm (5.30'')	Φ16mm (0.64'')	Φ30mm (1.18'')	98mm (3.86'')
Z01B-00699	1/4'' VCR	ISO NW25 Vacuum Flange	81mm (3.18'')	Φ16mm (0.64'')	Φ40mm (1.58'')	44mm (1.74'')
Z01B-00700	1/4'' VCR	ISO NW25 Vacuum Flange	104mm (4.08'')	Φ16mm (0.64'')	Φ40mm (1.58'')	67mm (2.64'')
Z01B-00701	1/4'' VCR	ISO NW40 Vacuum Flange	104mm (4.08'')	Φ16mm (0.64'')	Φ55mm (2.16'')	67mm (2.64'')

 

 

Typical Applications
☆Vacuum chambers requiring rapid and precise gas venting.

☆High-sensitivity semiconductor manufacturing environments.
☆Processes where turbulence minimization and particle control are critical.
With its advanced design and outstanding performance, the Diffuser Filter is the perfect choice foroptimizing filtration and flow control in semiconductor applications.
 

 

☆Filters high-pressure gases for cooling and process applications, especially in high-temperature settings.
☆Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.
These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,process efficiency, and final product quality across industries.

Company Profile

HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together. 

 

Packaging & Shipping

 

 

 

FAQ

Q1. Are you manufacturer or trading company?

--We are direct manufacturer specializing in porous sintered metal filters.

Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.

Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.

Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.

Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.

Q6. We have design, can you produce?
--Yes, welcome!

Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc