High Purity Bulk and Utility Gas Filters for Semiconductor Industry

• Customization: Available
• Filter Number: 1
• Type: Cartridge Filter
• Filter Name: High Purity Bulk and Utility Filters
• Filter Material: 316L Stainless Steel Powder Sintered
• Housing Material: 316L Stainless Steel
• Particle Interception Size: ≥ 0.003μm
• Maximum Inlet Pressure: 4 Bar
• Maximum Operating Differential Pressure: 5 Bar
• Maximum Operating Temperature: 400ºC
• Transport Package: Boxs
• Trademark: HENGKO
• Origin: Shenzhen, China

Product Description

Superior Filtration and Reliable High-Pressure Flow Control
for Semiconductor Processes

 

Product Description

High Flow Gas Filter - Specifically designed for ultra-high purity process gas filtration in semiconductor manufacturing. Precision-engineered from 316L stainless steel, it features a multi-column or stacked disk media design to ensure low resistance at high flow rates, with filtration accuracy reaching 0.003μm to meet ultra-high purity requirements. The all-metal construction makes it an ideal filtration solution for high-temperature dynamic environments.

                

Product Feature

☆All 316L Stainless Steel Structure - Ensures durability and resistance to corrosion.

☆High Flow Rate, Low Resistance - Optimized for high flow with minimal pressure loss.
☆Ultra-High Particle Retention Efficiency - Excellent for maintaining ultra-pure conditions.
☆Resistant to High Temperatures, Pressure, and Corrosion - Suitable for harsh environments.
☆Compatible with Various Process Gases - Versatile for multiple industrial applications.
☆Ideal for Cleanroom Manufacturing, Testing, and Packaging - Perfect for use in controlled environments.
☆100% Integrity Testing - Each filter undergoes comprehensive integrity testing for quality assurance.
☆100% Helium Leak Testing - Verified through helium leak testing to ensure reliability in critical applications.

Datasheet

Technical Parameters	Specification
Filter Element Material	316L stainless steel powder sintered
Housing Material	316L stainless steel
Max Inlet Pressure	207 bar
Max Operating Differential Pressure	5.2 bar
Helium Validation Leak Rate
Helium Testing Leak Rate
Surface Treatment	External Surface	Ra < 1.6 μm
	Internal Surface	Ra < 0.2 μm
Max Operating Temperature	Inert Gas	400-500ºC
	Corrosive & Reactive Gas	50ºC
Particle Retention Efficiency	≥99.9999999% (9LRV) @ 30 slpm
Downstream Cleanliness	≤0.03 particles/liter @ > 0.01 μm, 30 slpm
Particle Retention Size	≥0.003 μm

Size 

Here's the part number you can order and size details :

Product Model	Filter Element Material	Filtration Accuracy (μm)	Connection Type
Z01B-00647	316L Stainless Steel	10~0.003	1/4"
Z01B-00648	316L Stainless Steel	10~0.003	1/2"
Z01B-00649	316L Stainless Steel	10~0.003	1/8"
Z01B-00650	316L Stainless Steel	10~0.003	1"
Customizable	316L Stainless Steel	10~0.003	As Needed

 

 

 

Typical Applications
☆Semiconductor Manufacturing

☆Pharmaceutical Production
☆Laboratory Gas Systems
☆Food and Beverage Processing
☆Oil and Gas Industry
☆Chemical Manufacturing
☆Aerospace and Defense
☆Energy Production (Power Plants)
 

 

☆Filters high-pressure gases for cooling and process applications, especially in high-temperature settings.
☆Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.
These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,process efficiency, and final product quality across industries.
 

Company Profile

HENGKO Technology Co., Ltd., established in 2001, is professional manufacturer engaged in the research, development, production, sale and service of temperature and humidity devices and porous metal products. Our product range includes sintered metal filter, temperature and humidity sensor, temperature and humidity controller, dew point sensor, data logger, air diffuser and sensor housing. Dedicated to strict quality control and thoughtful customer service, our experienced staff members are always available to discuss customers' requirements and ensure full customer satisfaction. We look forward to forming a stable and extensive strategic partnership with friends from all walks of life and create a better future together. 

 

Packaging & Shipping

 

 

 

FAQ

Q1. Are you manufacturer or trading company?

--We are direct manufacturer specializing in porous sintered metal filters.

Q2. What's the delivery time ?
--Normal model 7-10 work days because we have ability to do the stock. For big order, it takes about 10-15 work days.

Q3. What is your MOQ?
-- Usually, it is 100PCS, but if we have other orders together, can help you with small QTY also.

Q4. What payment ways available?
-- Western Union, Paypal , T/T , Credit Card , online bank transfer, RMB , etc.

Q5. If sample first possible?
-- Sure, usually we have certain QTY of free samples, if not, we'll charge accordingly.

Q6. We have design, can you produce?
--Yes, welcome!

Q7. Which market do you already sell?
--We already ship to Europe, Middle East, Asia, South America , Afria, North America etc.